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Plasma-Processing-Induced Damage of Thin Dielectric Films

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Book Details

Contributors
Author Ren He
Dimensions
Width 5.98 inch
Height 0.39 inch
Weight 281 g
Format
Binding Paperback
Overview
Number of Pages 188 Pages
Publisher LAP Lambert Academic Publishing
Publication Year 2012
ISBN-13 9783843387583
ISBN-10 3843387583
Language English
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